Index of Semiconductor Process Gases

Note: In the tables RED is used for properties obtained from estimation methods. Other colors are used to distinguish between differing data sets within a single column. If no uncertainty is specified, then no uncertainty was provided by the reference.

Ammonia NH3 Nitrogen Trifluoride NF3
Argon Ar Nitrogen N2
Allene C3H4 Oxygen O2
Arsenic Trifluoride AsF3 Phosgene COCl2
Arsine AsH3 Phosphourous Trifluoride PF3
Trimethyl Arsine As(CH3)3 Phosphorous Pentafluoride PF5
Diborane B2H6 Phosphine PH3
Pentaborane B5H9 Sulfur Dioxide SO2
Boron Trichloride BCl3 Stibine SbH3
Bromine Br2 Silane SiH4
Carbon Dioxide CO2 Disilane Si2H6
Carbon Monoxide CO Silicon Tetrachloride SiCl4
Carbon Tetrafluoride CF4 Silicon Teterafluoride SiF4
Chlorine Cl2 Sulfur Hexafluoride SF6
Chlorine Trifluoride ClF3 Titanium Tetrachloride TiCl4
Ethylene Oxide C2H4O Tungsten Hexafluoride WF6
Helium He Uranium Hexafluoride UF6
Hexafluroethane C2F6 Vinyl Bromide C2H3Br
Hydrogen H2 Vinyl Fluoride C2H3F
Hydrogen Bromide HBr Vinyl Chloride C2H3Cl
Hydrogen Chloride HCl Trimethyl Gallium Ga(CH3)3
Hydrogen Fluoride HF Triethyl Gallium Ga(C2H5)3
Hydrogen Sulfide H2S Trimethyl Indium In(C2H5)3
Molybdenum Hexafluooride MoF6
Nitric Oxide NO
Nitrous Oxide N2O

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